（1）The residual water on the chip are separated from the surface of the chip by centrifugal force, which caused by the turntable rotating at high speed , finally, we have the dry wafer. And there are only FFU and electrostatic ion bar above the machine, through the negative pressure in the barrel, the wind into the dryer is efficiently filtered, and converted into ionic wind, this can eliminate the electrostatic ions which is generated by the rotary table rotating at high speed.
（2）Customized turntable and turntable designed for 2 cassette or 4 cassette, it can get high productivity. Lower production cost by dry fast, using non pure water and hot nitrogen. Lower plant energy consumption (only power and CDA loss).