Product name: CVD exhaust gas treatment equipment
Model :ZCVD-HW-2
working principle : in the process of semiconductor manufacturing, it can effectively decompose the toxic gas produced by CVD equipment through combustion and high temperature cracking , after cooling, using multi-layer water washing and spraying to deal it, then to the central waste gas treatment; impurities will be processed together by the collection system.

mainly to treat the exhaust gas of SIH4, NH3, PH3, PD3, SF6, CHF3 produced by the CVD equipment.