Product name: ICP exhaust treatment equipment
Model number:ZICP-4V
working principle : in the process of semiconductor manufacturing, it can effectively remove the toxic gas discharged from the ICP equipment through multi-layer water washing spraying and demisting, which can effectively reduce the crystallization in the discharge pipeline and discharge it to the central waste gas treatment, it can meet the emission standard.

mainly to treat the exhaust gas of BCL3,CL2,HCL produced by the ICP equipment.