•The unit module is designed around robot. Coater / Developer / AD / HP / CP and other units can be flexibly combined. Auxiliary function accessories can be selected to meet the production requirements of different processes, and meet the customer needs of different processes such as semiconductor front channel / high-end packaging / MEMS / LED and so on.

•Suitable for 2, 4, 6, 8 inch or 12 inch products.

•Suitable for silicon wafer, glass, sapphire, GaAs, etc. (flexible substrate needs special customization).It is also suitable for the production of Krf, i-line, etc, Package, PI, SOD, etc.